Jianfeng Luo,David A. Dornfeld: Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales
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Author: Jianfeng Luo,David A. Dornfeld
Number of Pages: 311 pages
Published Date: 15 Dec 2010
Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Publication Country: Berlin, Germany
Language: English
ISBN: 9783642061158
Download Link: Click Here
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